Comprehensive treatment of micro and nanofabrication techniques for engineers and researchers
Application of laboratory and research techniques to a wide variety of materials
Includes bulk and surface micromachining, LIGA, and deep X-ray lithography
Focuses on semiconductor manufacturing and master mold production
Written by Mark J Jackson, an associate professor in mechanical engineering
Summarized by Shop
Micro and Nanomanufacturing Jackson, Mark J.
Nanofabrication and nanotechnology present a great challenge to engineers and researchers as they manipulate atoms and molecules to produce single artifacts and submicron components and systems.
Micro and Nanomanufacturing provides a comprehensive treatment of established micro and nanofabricat