Extensive coverage of Auger microscopy fundamentals and instrumentation for foundational understanding
Detailed description of imaging artifacts and correction methods to ensure accurate data interpretation
Demonstration of multi-spectral Auger microscopy (Mulsam) for advanced surface mapping
Case studies in materials science and semiconductor manufacturing to illustrate real-world applications
Outlook for future developments in Auger microscopy to inspire further research
Summarized by Shop
This eagerly-awaited volume has been edited by two academic researchers with extensive and reputable experience in this field. Emphasis is given to the underlying science of the method of Auger microscopy, and its instrumental realization, the visualization and interpretation of the data in the sets of the images that form the output of t